The new field emission Auger probe JAMP-9510F, with 8 nm, offers the best lateral analytical resolution worldwide. In addition, the resolution of 3 nm in imaging mode highlights the benefits of a field emission beam source as compared to conventional LaB6 sources.
The JAMP-9510F achieves very small beam diameters at very high beam currents of up to 500 nA by using a low aberration condenser lens with the overlay of an electro-static field and a magnetic field, combined with a patented "in-lens" Schottky field emission source.
With the JAMP-9510F, a state-of-the-art ion source is for the first time being used for fast de-sputter and also for the neutralization of charges. This new ion source makes analysis of insulating specimen easy.
The JAMP-9510F is destined to produce high-resolution SEM images, Auger images, line profile analyses and depth profile analyses even during ion etching.
The electron spectrometer is an electrostatic, semi-spherical analyzer (HAS) with a multi-channel detector, optimally designed for Auger analyses, i.e. optimal energy resolution without loss of sensitivity.
A user-friendly and simple control system, along with flexible optional equipment, rounds the system out and makes the JAMP-9510F a universal device.
Field emission source (in-lens Schottky)
0.5 to 30 kV
10-12 to 5 · 10-7 A
Specimen current measurement
either Faraday cup or specimen stage, selectable
Hemispherical, electrostatic analyzer
Multi-channel detection with channeltrons, seven channels
≥ 840,000 cps (7 channels)
Pressure in the analysis chamber
≤ 5 · 10-8 Pa (optional: ≤ 1.3 x 10-8 Pa)
X: -48 mm to +10 mm
Y: ± 10 mm
Z: ± 6 mm
T: 0 to 90°
R: 360° (endless)
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.
We are happy to answer your questions at no charge and free of
obligation and can offer consulting on upcoming projects.
Please use the following contact form (* = mandatory field) for your personal data.