JEOL - Electron Beam Microprobes Analyzers (EPMA)

Electron Beam Microprobes Analyzers (EPMA)

By combining high resolution electron optics and wavelength dispersive x-ray spectroscopy, electron beam microprobes provide highly sensitive, spatially resolved quantitative trace-element analysis. Having introduced the first electron beam microprobe to the market in 1960, followed by the development of many new equipment generations in the years since, JEOL can boast the most extensive experience worldwide in the x-ray microanalysis sector.

JEOL electron beam microprobes feature highly stable electron optics in combination with wavelength dispersive crystal spectrometers (WDS) for x-ray microanalysis of solid specimens of any type. Elements that can be analyzed range from beryllium to uranium.

Thanks to the development of computer technology and its focused integration in microanalysis, expansive analysis processes can be performed efficiently.
The analysis of light elements can be performed very precisely with the JEOL electron beam microprobes due to developments of new crystals for wavelength dispersive spectrometers.



For additional product information, please select a model from the following list.

  • JEOL JXA-8230 Superprobe

    JEOL JXA-8230 Superprobe

    Based on 45 years of experience and the continuous exchange of experiences with users, the JEOL Superprobe JXA-8230 provides a system that delivers optimum results for diverse applications in analytics and imaging.

  • JEOL JXA-8530F Hyperprobe

    JEOL JXA-8530F Hyperprobe

    The hyperprobe JXA-8530F is already the second generation of JEOL electron beam microprobes, which, thanks to a Schottky field emission source, helps to advance the application ranges for microanalysis. For the JXA-8530F, the electron optics and the vacuum system were ...


Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.


Second-hand Equipment

Second-hand Equipment

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