Built off of the highly successful predecessor of our InTouchScope™ series SEMs, the JSM-IT500HR was developed to meet increasing demands in the market place. This new SEM breaks through the conventional general-purpose SEM in terms of high resolution imaging and high spatial-resolution analysis, by incorporating a new high-brightness electron gun. Furthermore, integration of JEOL’s energy dispersive X-ray spectrometer (EDS) into the JSM-IT500HR allows for seamless acquisition from image collection to elemental analysis.
The JSM-IT500HR adopted our Multi Touch Operating System that has been highly regarded in our InTouchScope™ series. The touch screen interface incorporates various automatic functions.“Specimen Exchange Navi”enables acquisition of high-quality data without complicated condition setup and area search.
The JSM-IT500HR integrateshigh performance with unprecedented ease of use, enabling dramatically improved work efficiency.
We proudly introduce a new addition to our JEOL InTouchScope™ series SEMs, the JSM-IT500HR.
Increase your productivity with our fully-integrated software, from specimen navigation to analysis to report creation.
This state-of-the-art SEM, with its high-brightness electron gun system, provides amazing high-resolution imaging along with high sensitivity and high spatial resolution analysis at even faster speeds.
(30 kV) 4.0 nm (1.0 kV)
nm (15 kV, Probe current 1 nA)
1.8 nm (15 kV BED)
x 5 to
brightness electron gun
0.5 kV to
1 pA to 20
10 to 150
adjustment, Gun alignment,
diameter, 75 mm height
mm Y: 100 mm Z: 80 mm
electron image, REF image, Compositional image,Topographic image, Stereo-microscopic image
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.
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