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JEOL - PAMS Pre-Alignment Microscope Systems

PAMS Pre-Alignment Microscope Systems

PAMS is a series of optical pre-aligners for cassettes for JEOL electron beam lithography tools. It simplifies the extraction of SETWFR parameters and rotation error information from the substrate.

Alignment marks on the substrate are used in E-beam lithography to enable consecutive pattern exposures to be aligned with the required sub-micron or nanometer accuracy. These marks can be of various design but their position must be close to the expected position for the automatic mark detection system to find them and measure their positions.

Experimental or non-standard wafers mounted in the cassette often have considerable and unpredictable placement errors. The SEM-mode of the E-beam must then be used to manually search for and find the marks. Once found, their positions relative to the coordinate system of the E-beam tool must be measured. There are 3 problems involved in this procedure:

  • The field of view in SEM-mode is very limited, typically only 0.5-1 mm, so finding the marks can be difficult.
  • The electrons used for viewing will expose the photoresist and can damage the substrate.
  • The rotation error of the sample mounting must be within the small range of what the E-beam can adjust for. If too large, the cassette has to be removed from the E-beam and the sample readjusted, which is a very time-consuming operation.
 
 

How PAMS solves these problems

After mounting the sample in the cassette, the cassette is placed on the PAMS for optical non-destructive inspection with a large field of view and with positional measurement and registration that mimics the coordinate system of the E-beam. Once the the global marks are located and placed on the live image cross-hair, the positions are registered by the push of a button in the PAMS Metrology Tool software. The actual mark positions are compared with the nominal mark positions and the offset extracted in a format to be entered directly into the job description files - enabling immediate exposure without further realignment.

The rotation of the workpiece is also measured to verify that it is within the permitted range. If too large mounting errors are found, the workpiece position and rotation can easily be readjusted in the PAMS. A final control measurement will guarantee success.

This saves much time compared with the very time consuming process of removing the cassette from the E-beam for readjusting the rotation of the sample.

The PAMS system has been developed and used extensively in an JEOL E-beam user environment and has already proven itself as an invaluable tool to reduce E-beam exposure setup time.

 
 

System description

The PAMS has a manually operated transmission microscopy stage with digital encoders and a computer interface to register the positions. The cassette is mounted upside-down so that the workpiece can be viewed from below, while the workpiece is held by gravity force to enable simple adjustment prior to locking it to the cassette.

PAMS-1006 display 
PAMS-1006 display
 

Special software compensates for differences between the E-beam stage encoders and the microscopy stage encoders. The software also uses the same terminology as the E-beam software to simplify the extraction of offset parameters for exposure job control files.

 
 

Models:

For additional product information, please select a model from the following list.

  • PAMS-1006

    PAMS-1006

    The PAMS-1006 is designed to work with JEOL JBX-5DII/6000FS/6300FS electron beam lithography systems. It has a 200 mm stage mounted on a modified conventional inverted microscope with fixed objectives and coaxial illumination. A digital camera is attached to acquire a live image of the workpiece, using digital zoom up to eight times to simplify the positional accuracy.

  • PAMS-1101

    PAMS-1101

    The PAMS-1101 is primarily designed to work with JEOL JBX-9300FS/FS9500FS electron beam lithography systems. It has a 300 mm stage mounted on a modified conventional inverted microscope with fixed objectives and coaxial illumination. A digital camera is attached to acquire a live image of the workpiece, using digital zoom to improve the positional accuracy.

 
 

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

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JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
DE-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de


JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se


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JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
D-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se

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External link to Website www.jeol-arm.eu