JEOL - Electron Beam Lithography

Electron Beam Lithography

In the year 1967 JEOL started to develop and to manufacture electron beam lithography systems. The product line includes systems for masks and direct writing lithography and ranges from laboratory systems to production systems for masks.

In addition, JEOL offers modular systems based on scanning electron microscopes for less complex lithography applications, especially to be used in the field of nano technology research and development.

 
 

Models:

For additional product information, please select a model from the following list.

  • JEOL JBX-3050MV

    JEOL JBX-3050MV

    High-performance system for the mask exposure of structure sizes down to 32 nm. LaB6 cathode with shaped beam electron optics. Writing field 150 mm x 150 mm. Electron source: LaB6 emitter. Acceleration voltage: 50 kV...

  • JEOL JBX-8100FS Series Electron Beam Lithography System

    JEOL JBX-8100FS Series Electron Beam Lithography System

    Innovative lithography system with a modular design.

  • JEOL JBX-9500FS

    JEOL JBX-9500FS

    Spot beam system for direct writing and mask production. Large writing fields for all voltages. Stage travel 230 mm x 230 mm, substrate sizes of up to 300 mm. Automatic single cartridge operation or automatic loading system (optional).

 
 

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

Contact, dates and things to know

Contact

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
DE-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de


JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se


Contact

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Second-hand Equipment

 
JEM-1010
The JEM-1010 is a cost-effective and powerful high-resolution electron microscope with an acceleration voltage up to 100 kV.
JEM-1400Plus
Transmission Electron Microscope JEOL JEM-1400Plus from our applications laboratory.
IB-19510CP
Easy-to-operate preparation system for the production of specimen cross-sections for SEM, EPMA and auger applications.
JSM-7800F PRIME
Extreme-resolution Analytical Field Emission SEM. JEOL JSM-7800F PRIME from our applications laboratory.
 
 
 

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JEOL-Seminars

Our seminars are only available in German language. Please contact us if you have questions about specific trainings and seminars.

The next seminar sessions will be held on:

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JEOL-Academy

Our workshops and trainings are only available in German language. Please contact us if you have questions about specific trainings and seminars.

The next training sessions will be held on:

Exhibitions and Conferences

 
  • MC 2017

    21.08. - 25.08.2017 Swiss
    SwissTech Convention Center, Lausanne

  • MinPet 2017

    06.09. - 09.09.2017 Austria
    University of Innsbruck, Innsbruck

  • SAAM

    07.09. - 08.09.2017 Germany
    Forschungszentrum Jülich, Jülich

  • Metallographie-Tagung

    13.09. - 15.09.2017 Germany
    University Aalen, Aalen

 
External link to website www.jeol.com

Globale Website

 
External link to Website www.jeol-arm.eu

JEOL ARM-Owner-Group

 
 
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Kontakt

Contact

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
D-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se

Global website

Global website

External link to website www.jeol.com

JEOL ARM-owner-group

External link to Website www.jeol-arm.eu