JEOL Analytical Services - Top-level analytical services
JEOL - Electron Beam Lithography

Electron Beam Lithography

In the year 1967 JEOL started to develop and to manufacture electron beam lithography systems. The product line includes systems for masks and direct writing lithography and ranges from laboratory systems to production systems for masks.

In addition, JEOL offers modular systems based on scanning electron microscopes for less complex lithography applications, especially to be used in the field of nano technology research and development.

 
 

Models:

For additional product information, please select a model from the following list.

  • JEOL JBX-9500FS

    JEOL JBX-9500FS

    Spot beam system for direct writing and mask production. Large writing fields for all voltages. Stage travel 230 mm x 230 mm, substrate sizes of up to 300 mm. Automatic single cartridge operation or automatic loading system (optional).

  • JEOL JBX-6300FS

    JEOL JBX-6300FS

    Spot beam system for very fine structures (direct writing and mask production). Ideal for research and development. Minimal tolerances for stitching and overlay. Stage travel 150 mm x 150 mm, substrate sizes of up to 200 mm. Single cartridge operation or …

  • JEOL JBX-3050MV

    JEOL JBX-3050MV

    High-performance system for the mask exposure of structure sizes down to 32 nm. LaB6 cathode with shaped beam electron optics. Writing field 150 mm x 150 mm. Electron source: LaB6 emitter. Acceleration voltage: 50 kV...

 
 

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

Contact, dates and things to know

Contact

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
DE-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de


JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se


Contact

Registration
Newsletter subscribe

Through the free registration you will receive a number of additional information and you have the possibility to win a voucher for our JEOL-Academy.


Login


Second-hand Equipment

 
JEM-1400Plus
Transmission Electron Microscope JEOL JEM-1400Plus from our applications laboratory.
IB-19510CP
Easy-to-operate preparation system for the production of specimen cross-sections for SEM, EPMA and auger applications.
JSM-IT300 LV
High-performance and multi-purpose Scanning Electron Microscopes capable of handling a variety of applications. JEOL JSM-IT300 LV from our applications laboratory.
JSM-7800F PRIME
Extreme-resolution Analytical Field Emission SEM. JEOL JSM-7800F PRIME from our applications laboratory.
 
 
 

Customer survey:
Tell us your opinion

Your opinion is important to us! Please, find time a few minutes and help us by your participation in our customer survey our service to improve even further. Of course the whole questioning is anonymous and your specifications are used only for internal evaluations.

JEOL-Seminars

Our seminars are only available in German language. Please contact us if you have questions about specific trainings and seminars.

The next seminar sessions will be held on:

No entries existent

JEOL-Academy

Our workshops and trainings are only available in German language. Please contact us if you have questions about specific trainings and seminars.

The next training sessions will be held on:

Exhibitions and Conferences

 
  • PICO 2017

    30.04. - 04.05.2017 Netherland
    Kasteel Vaalsbroek, Vaalsbroek

  • EMAS 2017

    07.05. - 11.05.2017 Germany
    Konzilgebäude Konstanz, Konstanz

  • CONTROL 2017

    09.05. - 12.05.2017 Germany
    Messe Stuttgart, Stuttgart

  • SCANDEM 2017

    05.06. - 09.06.2017 Island
    University of Island, Reykjavik

 
External link to website www.jeol.com

Globale Website

 
External link to Website www.jeol-arm.eu

JEOL ARM-Owner-Group

 
 
RSS
Kontakt

Contact

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
D-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se

Global website

Global website

External link to website www.jeol.com

JEOL ARM-owner-group

External link to Website www.jeol-arm.eu