JEOL JBX-9500FS

JEOL JBX-9500FS

Product
Specifications
Info

JEOL JBX-9500FS

  • Spot beam system for direct writing and mask making
  • Large writing fields (up to 1mm x 1mm)
  • Writing area 230 mm x 230 mm
  • substrate sizes of up to 300 mm
  • Automatic single cartridge operation or loading system (option)

Specifications



Electron source

ZrO/W (Schottky) emitter

Acceleration voltage

100 kV

Min. beam diameter

4 nm (100 kV)

Substrate size

Up to 300 mm

Beam shape

Spot

Deflection

Vector scan

 
 

Please note:

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

 

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Do you have any questions concerning our JEOL JBX-9500FS? Please feel free to use the following form – we will get back to you within a working day.

 
 
 
 
 

Contact, dates and things to know

Contact

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
DE-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de


JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se


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Kontakt

Contact

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH supports customers in Germany, Liechtenstein, Austria, Switzerland, Denmark and the Baltic Countries.

JEOL (Germany) GmbH
Gute Änger 30
D-85356 Freising · Germany
Phone: +49 8161 9845-0
Fax: +49 8161 9845-100
E-mail: info@jeol.de

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB supports customers in Finland, Greenland, Iceland, Norway and Sweden.

JEOL (Nordic) AB
Hammarbacken 6A
SE-19127 Sollentuna · Sweden
Phone: +46 828 2800
Fax: +46 829 1647
E-mail: info@jeol.se

Global website

Global website

External link to website www.jeol.com

JEOL ARM-owner-group

External link to Website www.jeol-arm.eu