Semiconductor Equipment
for Semiconductor Industry and Research

JEOL has served the semiconductor industry for more than 40 years with both e-beam and ion beam optics designed for precise patterning and inspection. Our latest generation of tools offers advanced capabilities that will take you through several next-generation designs – through the 22nm node.

JEOL produces both front-end and back-end tools for advanced semiconductor research and manufacturing. From e-beam lithography systems and FE-SEMs used to write high precision masks, reticles, and wafers…to FIB/SEM solutions for high throughput, cross-section imaging…to defect review tools designed for rapid analysis…JEOL semiconductor equipment meets the increasingly sophisticated needs of fabs and research laboratories. JEOL offers leading-edge solutions for 200/300mm, nano-fabrication processes, and nanoscience research -- backed by award-winning 24/7 service support and long-term commitment to our customers.

Semiconductor Equipment for Semiconductor Industry and Research

Electron Beam Lithography Systems
Wafer and Mask Inspection Systems
CD Measurement Systems for Masks