JEOL JAMP-9510F Auger Micro Probe
JEOL JAMP-9510F Auger Micro Probe
The new field emission Auger probe JAMP-9510F, with 8 nm, offers the best lateral analytical resolution worldwide. In addition, the resolution of 3 nm in imaging mode highlights the benefits of a field emission beam source as compared to conventional LaB6 sources.
The JAMP-9510F achieves very small beam diameters at very high beam currents of up to 500 nA by using a low aberration condenser lens with the overlay of an electro-static field and a magnetic field, combined with a patented "in-lens" Schottky field emission source.
With the JAMP-9510F, a state-of-the-art ion source is for the first time being used for fast de-sputter and also for the neutralization of charges. This new ion source makes analysis of insulating specimen easy.
The JAMP-9510F is destined to produce high-resolution SEM images, Auger images, line profile analyses and depth profile analyses even during ion etching.
The electron spectrometer is an electrostatic, semi-spherical analyzer (HAS) with a multi-channel detector, optimally designed for Auger analyses, i.e. optimal energy resolution without loss of sensitivity.
A user-friendly and simple control system, along with flexible optional equipment, rounds the system out and makes the JAMP-9510F a universal device.
Specifications
| Electron optics | |
|---|---|
Electron source | Field emission source (in-lens Schottky) |
Acceleration voltage | 0.5 to 30 kV |
Specimen current | 10-12 to 5 · 10-7 A |
Specimen current measurement | either Faraday cup or specimen stage, selectable |
Objective aperture | 4-stage, motorized |
| Analysis system | |
|---|---|
Analyzer | Hemispherical, electrostatic analyzer |
Detector | Multi-channel detection with channeltrons, seven channels |
Sensitivity | ≥ 840,000 cps (7 channels) |
| Vacuum system | |
|---|---|
Pressure in the analysis chamber | ≤ 5 · 10-8 Pa (optional: ≤ 1.3 x 10-8 Pa) |
| Specimen stage | |
|---|---|
Stage Movement | X: -48 mm to +10 mm |
Y: ± 10 mm | |
Z: ± 6 mm | |
T: 0 to 90° | |
R: 360° (endless) |
Options (selection)
- EDS, EBSD, SIMS, XPS
- Large specimen stage (max. 95mm diameter)
- Back scattered electron detector
- Specimen cooling and specimen fracturing device
- Specimen heating
- Additional specimen parking station
Please note:
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.