The JEOL JXA-8530FPlus is a third-generation electron beam microprobe that comes with enhanced analytical and imaging capabilities, delivered by an improved electron optical system. The In-Lens Schottky FEG combined with new software provides higher throughput. This new cutting-edge FE-EPMA also adopts a highly-expandable multipurpose chamber. Incorporating various functions, the JXA-8530F Plus meets a variety of demands of users while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.
This microprobes is the perfect analyzer for university, laboratories as well as public R&D sites.
Elemental analysis range
WDS: (Be) B to U, EDS: B to U
X-ray spectrometry range
WDS spectrometry range: 0.087 to 9.3 nm
Number of X-ray spectrometers
WDS: 1 to 5 selectable, EDS: 1
Maximum specimen size
100 mm × 100 mm × 50 mm (H)
1 to 30 kV (0.1 kV step)
Probe current stability
Secondary electron image resolution
3 nm at WD 11 mm, 30 kV
ｘ40 to ｘ300,000 (WD 11mm)
Scanning image pixel resolution
Up to 5,120 ｘ 3,840
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.