Electron Beam Microprobes Analyzers

JEOL JXA-8530FPLUS Field Emission Electron Probe Microanalyzer

Product
Features
Specifications
Pictures
Info

JEOL JXA-8530FPLUS Field Emission Electron Probe Microanalyzer

The JEOL JXA-8530FPlus is a third-generation electron beam microprobe that comes with enhanced analytical and imaging capabilities, delivered by an improved electron optical system. The In-Lens Schottky FEG combined with new software provides higher throughput. This new cutting-edge FE-EPMA also adopts a highly-expandable multipurpose chamber. Incorporating various functions, the JXA-8530F Plus meets a variety of demands of users while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.

This microprobes is the perfect analyzer for university, laboratories as well as public R&D sites.

Features

  1. JEOL In-lens Schottky FEG
    The JEOL In-Lens Schottky Plus FEG EPMA version, with an optimized angular current density, allows for analysis with a large and variable adjustable probe current from 1 nA up to >2 μA. The resolution of secondary electron image has been improved even under analytical conditions by automatically adjusting the correct convergence angle.

  2. Advanced software
    A wealth of Microsoft Windows®-based advanced applications systems are available, including:

    a) Trace Element Analysis Program for simpler, optimized analysis of trace elements including adding data collected from up to 5 spectrometers
    b) Phase Map Maker for automatic creation of phase maps based on principal components
    c) Non-Flat Surface Analysis Program for automated WDS analysis of specimens with surface irregularities.

    Notices: Windows is a registered trademark of Microsoft Corporation in the United States and other countries.

  3. Flexible WDS-spectrometer configuration
    Various X-ray spectrometers (WDSs) can be selected (2 crystal or 4 crystal spectrometer, spectrometer optimized for trace elements or high count rates). Also a huge variety of different Analyzer crystals is available. Users can select from these spectrometers depending on requirements.

  4. Combined WDS/EDS system
    The JXA-8530F Plus comes with JEOL’s 30 mm2 silicon-drift detector (SDD). A high count-rate SDD along with an in-situ variable aperture enables EDS analyses at WDS conditions. EDS spectra, maps and line scans can be acquired simultaneously with WDS data.

  5. Multipurpose chamber
    The JXA-8530F Plus is equipped with a highly expandable specimen chamber and specimen exchange chamber, enabling you to integrate a variety of optional attachments on the chamber.

    These include:
    • Electron Backscatter Diffraction System (EBSD)
    • Cathodoluminescence Detectors (panchromatic, monochromatic, full color hyperspectral)
    • Soft X-ray Emission Spectrometer
    • Air Isolated Transfer Vessel
    • High Etching Rate Ion Source

  6. Powerful clean vacuum system
    A powerful, clean vacuum system is employed on the JXA-8530F Plus, including two magnetic-levitation turbo molecular pumps. In addition, a two-stage intermediate chamber is provided for the electron optical column, thus maintaining high vacuum in the electron-gun chamber by differential pumping.

  7. Soft X-ray Emission Spectrometer (SXES)
    Already frequently in use, JEOL’s ultra-high energy-resolution Soft X-ray Emission Spectrometer enables unprecedented chemical state analyses and trace element analyses. The variable-line-spacing (VLS) grating enables simultaneous detection (much like EDS) and allows detection of Li-K and B-K spectra with a high-sensitivity CCD. This spectrometer achieves superb energy-resolution, enabling detailed chemical-bonding state analysis.

  8. miXcroscopy (Correlative microscope)
    Regions of interest, along with X-Y stage coordinates, located in the optical microscope can be recorded and transferred to the EPMA for navigation to the desired location for imaging and analysis.

Specifications

Electron optics

Elemental analysis range

WDS: (Be) B to U, EDS: B to U

X-ray spectrometry range

WDS spectrometry range: 0.087 to 9.3 nm
EDS energy range: 20 keV

Number of X-ray spectrometers

WDS: 1 to 5 selectable, EDS: 1

Maximum specimen size

100 mm × 100 mm × 50 mm (H)

Accelerating voltage

1 to 30 kV (0.1 kV step)

Probe current stability

± 0.3%/h

Secondary electron image resolution

3 nm at WD 11 mm, 30 kV
20 nm at 10 kV, 10 nA, WD 11 mm
50 nm at 10 kV, 100 nA, WD 11 mm

Magnification

x40 to x300,000 (WD 11mm)

Scanning image pixel resolution

Up to 5,120 x 3,840

Please note:

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

Contact Form

We are happy to answer your questions at no charge and free of obligation and can offer consulting on upcoming projects. Please use the following contact form (* = mandatory field) for your questions.

Choose Contact type*

Your Contact details*



News from JEOL


Message to JEOL

Disclosure of personal data to third parties

This website uses services that collect personal data in order to provide social media features and to analyse our traffic. These services include Google Maps (for the display of our location) and Google Analytics (for local website analysis). These integrated services might merge the personal data with further data. Further information on the used cookies and withdrawal can be found in our data privacy statement.
Your consent is voluntary, not necessary for using the website and can be withdrawn anytime.
You can accept or decline the transfer and processing of data by the following services.

I have read and understood the notes on privacy. I agree to the transfer and storage of my data according to the data privacy statement. I know that I have the right to withdraw this consent at any time without giving any reason, without affecting the lawfulness of the data processed after my consent and until withdrawal.