Scanning Electron Microscopes (SEM)

JEOL JSM-IT510 InTouchScope™


JEOL JSM-IT510 InTouchScope™

The JSM-IT510 is a new model of JEOL InTouchScope™ series.

Equipped with our sophisticated Analytical series, the JSM-IT510 facilitates any analyses from specimen loading to report generation.


  1. Integration of SEM and EDS system
    Further integration of SEM and EDS system enables seamless operation form observation to analysis.

  2. New "Zeromag" function
    With our Zeromag function, sample navigation is even easier than ever. You can locate areas for imaging or specify analysis positions over multiple fields using an optical image or holder graphic.

  3. New "Live Analysis" function
    With our Analytical series (“Live Analysis”), the embedded EDS system shows a real time EDS spectrum during image observation for efficient elemental analysis.

  4. "SMILE VIEW™ Lab" for integrated management of image and analysis data
    All data from collected SEM images to elemental analysis results are integrated to facilitate fast report generation.

  5. Specimen Exchange Navigation
    Guided operation from specimen introduction to image observation.


JSM-IT510 series can be equipped as follows:


HV mode : 3.0 nm (30 kV) 15.0 nm (1.0 kV)
LV mode : 4.0 nm (30 kV with Backscattered electron image)

Direct magnification

x 5 to x 300,000
(reference image 128 mm x 96 mm)

Displayed magnification

x 14 to x 839,724
(reference image 358 mm x 269 mm)

Electron gun

Tungsten (W) filament

Accelerating voltage

0.3 kV to 30 kV

Probe current

1 pA to 1 μA

LV pressure adjustment

10 to 650 Pa

Automatic functions

Filament adjustment, Gun alignment,
Focus / Stigmator / Brightness / Contrast

Maximum specimen size

200 mm diameter, 90 mm height

Specimen stage

Large eucentric type
X: 125 mm Y: 100 mm Z: 80 mm Tilt: -10° to 90° Rotation: 360°

Standard recipe

Built-in (includes EDS conditions)

Image modes

Secondary electron image, REF image,
Compositional image, Topographic image, Stereo-microscopic image

EDS functions

Spectral analysis, Qualitative & Quantitative analysis,
Line analysis (horizontal line, specific direction line),
Elemental mapping, Probe tracking


  • Backscattered Electron Detector (BED)
  • Low Vacuum Secondary Electron Detector (LSED)
  • Energy Dispersive X-ray Spectrometer (EDS)
  • Wavelength Dispersive X-ray Spectrometer (WDS)
  • Electron Backscatter Diffraction Detector (EBSD)
  • Load Lock Chamber (pre-exchange chamber)
  • Stage Navigation System (SNS)
  • Chamber Scope (CS)
  • Operation Panel
  • 3D Measurement Software

Please note:

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

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