JEOL JSM-IT510 InTouchScope™
JEOL JSM-IT510 InTouchScope™
The JSM‑IT510 is a new model of the JEOL InTouchScope™ series. Offering a powerful and intuitively operated scanning electron microscope (SEM) for research, quality control and industrial environments, it combines a large specimen chamber with a choice of electron sources (W, LaB₆ or High‑Brightness) and integrated live analysis, making it a versatile instrument for demanding applications.
With its expanded EDS analysis capabilities, the InTouchScope is a versatile workhorse SEM that can be configured to meet individual lab requirements at an exceptional value. It offers high-resolution imaging and continuously adaptable acceleration voltages at both high and low vacuum mode.
IT510’s intuitive use enables you to easily streamline workflows in any lab. Touchscreen operation or traditional keyboard and mouse interface are at the operator's fingertips. Fast data acquisition make imaging and analysis of samples a simple task.
Thanks to automatic parameter optimisation, it is simple to quickly obtain high quality images using both Secondary Electron and Backscatter Imaging with the IT510. The embedded JEOL EDS system with live analysis includes spectral mapping, multi-point analysis, automatic drift compensation, line scan, and mapping filter functions. The modern SEM even allows to display 3D topographic images and 3D EDS mappings in real-time.
Features
The new JSM-IT510 expands JEOL’s popular InTouchScope™ SEM series.
Boost your productivity with a fully integrated software solution, delivering a seamless workflow from sample navigation and analysis through to reporting.
- New high-brightness field emission electron source for high-resolution imaging and analytical performance.
- ZeroMag
- Live EDX enables real-time elemental analysis during image acquisition for the first time.
- Wide Pressure Range Without Mechanical or Manual Switching
From high-resolution imaging in high vacuum to flexible low-vacuum operation at chamber pressures of up to 650 Pa for outgassing or poorly conductive specimens, the IT510 allows the chamber pressure to be adjusted precisely at the touch of a button – without any manual intervention or mechanical reconfiguration. The full field of view remains unchanged throughout the entire pressure range. - New Backscattered Electron Detector with Live 3D Imaging
The segmented BSE detector supports the established Topographic (Topo), Compositional (Compo), and Shadow imaging modes while also enabling real-time 3D surface reconstruction. Live EDX elemental maps can be overlaid directly onto the generated 3D surface, providing enhanced visualization and interpretation of uneven or complex specimen topographies. This significantly improves the analysis of rough or irregular surfaces. - Integrated data management for effortless reporting of all acquired data.
- Simple and efficient operation, from sample loading through to image acquisition.
- Newly developed Auto Beam Alignment ensures optimal electron-optical conditions at all times.
- Large specimen stage suitable for a wide range of sample types, combined with a compact footprint
Options
- Low Vacuum Secondary Electron Detector (LSED)
Hybrid Low-Vacuum Secondary Electron Detector with Cathodoluminescence (CL) Detection - Energy Dispersive X-ray Spectrometer (EDS)
- Wavelength Dispersive X-ray Spectrometer (WDS)
- Electron Backscatter Diffraction Detector (EBSD)
- Load Lock Chamber (pre-exchange chamber)
- Stage Navigation System (SNS)
- Chamber Scope (CS)
- Operation Panel
- 3D Measurement Software
Specifications
JSM-IT510 series can be equipped as follows:
Resolution | HV mode : 3.0 nm (30 kV) 15.0 nm (1.0 kV) |
Direct magnification | x 5 to x 300,000 |
Electron gun | Tungsten (W) filament |
Accelerating voltage | 0.3 kV to 30 kV |
Probe current | 1 pA to 1 μA |
LV pressure adjustment | 10 to 650 Pa |
Automatic functions | Filament adjustment, Gun alignment, |
Maximum specimen size | 200 mm diameter, 75 mm high (80 mm height / 90 mm height with optional sample holder) |
Specimen stage | Large eucentric type |
Standard recipe | Built-in (includes EDX conditions) |
Image modes | Secondary electron image, REF image, |
EDX functions | Spectral analysis, Qualitative & Quantitative analysis, |
Please note:
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.