Rasterelektronenmikroskope (REM)
LazEdge - Laser SEM system
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LazEdge Laser SEM System
The LazEdge system combines JEOL's SEM technology with laser technology from Hamamatsu Photonics K.K., enabling direct laser processing within the specimen chamber of the electron microscope. The system features a state-of-the-art field emission scanning electron microscope (FE-SEM) designed for operation in high and low vacuum. Switching between vacuum modes can be performed during operation if charging artifacts occur, as no hardware aperture changes are required. In addition, a JEOL EDS system for elemental analysis is fully integrated into the SEM software.
This system enables not only the preparation of high-quality cross-sections but also large-volume 3D material analysis through fast, large-area processing. The exposed areas are immediately available for subsequent investigations – such as SEM imaging, elemental analysis, or crystal orientation analysis – without environmental exposure. As a result, the system covers various analytical requirements, including the investigation of metal specimens, air-sensitive battery materials, and semiconductor failure analysis.
This system enables not only the preparation of high-quality cross-sections but also large-volume 3D material analysis through fast, large-area processing. The exposed areas are immediately available for subsequent investigations – such as SEM imaging, elemental analysis, or crystal orientation analysis – without environmental exposure. As a result, the system covers various analytical requirements, including the investigation of metal specimens, air-sensitive battery materials, and semiconductor failure analysis.
Serial Cross-Sectioning and 3D SEM Analysis
- High-quality preparation inside the specimen chamber: By integrating a femtosecond laser processing system into the SEM, the LazEdge enables rapid preparation of large areas directly in a vacuum. Utilizing a proprietary optical system that allows spatial phase modulation of the laser beam, a preparation plane with reduced LIPSS (Laser-Induced Periodic Surface Structures) is achieved.
- Prevention of contamination in the specimen chamber: The proprietary "LazEdge Shield" technology prevents the uncontrolled scattering of ablated material during processing. Detectors, the electron optical column, and the specimen chamber walls are thereby protected from contamination and kept permanently clean.
- Seamless workflow via laser-based serial sectioning: The fs-laser-based material ablation of up to several millimeters and the subsequent imaging are performed successively and alternately. Both processes take place directly in the SEM chamber under vacuum, eliminating the need for specimen transfer from the SEM stage. This laser-based serial sectioning provides cross-sections of a quality that is immediately suitable for EBSD (Electron Backscatter Diffraction) measurements. Through the automated repetition of ablation and measurement steps, large-format 3D EBSD analyses can be realized.
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