Scanning Electron Microscopes (SEM)

JSM-7610FPlus Schottky Field Emission Scanning Electron Microscope


JSM-7610FPlus Schottky Field Emission Scanning Electron Microscope

New Ultrahigh Resolution Schottky Field Emission Scanning Electron Microscope JSM-7610FPlus - High-performance FE-SEM enabling observation and analysis of extremely fine structures


  • The JSM-7610FPlus incorporates a semi-in-lens objective lens capable of finely focusing an electron probe, thus enabling high resolution to be obtained even at low accelerating voltages and higher working distances.
  • GENTLEBEAM™ mode (GB mode) is a function to decelerate the electron probe just above the specimen by applying a bias voltage to the specimen stage. This mode is very suitable for observation and analysis at low accelerating voltages.
  • Electrons are generated from the specimen when irradiated with the electron probe. The r-filter is used to filter those electrons to selectively detect secondary- or backscattered electrons.
  • The LABE (Low Angle Backscattered Electron) detector is capable of detecting low-energy backscattered electrons at low angles. The detailed topographic information on the specimen surface can be obtained at low accelerating voltages. The composition of the specimen can be observed at high accelerating voltages.
  • The in-lens Schottky field emission electron gun that provides a large probe current with high stability, and the aperture angle control lens (ACL) that automatically optimizes the electron probe diameter over all the probe current range, are successfully combined. This superb capability allows stable observation and analysis conditions.
  • A new sample exchange system is designed to change even larger samples in a safe, speedy, seamless manner through simple operation.
  • The JSM-7610FPlus accommodates various attachments, including EDS (energy dispersive X-ray spectrometer), WDS (wavelength dispersive X-ray spectrometer), CL (cathodoluminescence detector) and other analytical detectors, thus responding to diversified analytical needs.


Secondary electron image resolution

0.8 nm (Accelerating voltage 15 kV)
1.0 nm (Accelerating voltage 1 kV GB mode)
During analysis 3.0 nm (Accelerating voltage 15 kV, WD 8 mm, Probe current 5 nA)


×25 to 19,000 (LM mode)
×130 to 1,000,000 (SEM mode)

Accelerating voltage

0.1 to 30 kV

Probe current

A few pA to ≥ 200 nA

Electron Gun

In-lens Schottky field emission electron gun

Lens system

Condenser lens (CL)
Aperture-angle control lens (ACL)
Semi-in lens objective lens (OL)

Specimen stage

Fully eucentric goniometer stage

Specimen exchange

One-action exchange mechanism

Electron detector system

Upper detector with built-in r-filter, lower detector, opt. LABE detector, STEM detector and others

Please note:

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

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