Electron source | ZrO/W (Schottky) emitter |
Acceleration voltage | 100 kV |
Min. beam diameter | 4 nm (100 kV) |
Substrate size | Up to 300 mm |
Beam shape | Spot |
Deflection | Vector scan |
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.