JEOL JSM-IT810 Schottky Field Emission Scanning Electron Microscope
JEOL JSM-IT800 Schottky Field Emission Scanning Electron Microscope
Versatility and high spatial resolution meet automation with the JSM-IT810 series FE-SEM. Automation workflows for imaging and EDS analysis are built-in for unattended operation and high through-put. New functions are available to ensure high quality data and an enhanced user experience for all SEM users. Functions include the SEM automatic adjustment package, a trapezoidal correction function (useful for distortion-free EBSD measurements) and Live 3D surface reconstruction for the observation of surface topography. Owing to the patented In-Lens Schottky Plus technology, the microscope not only facilitates imaging of sensitive samples with high resolution at low dose conditions but also delivers highest beam currents for ultra-fast microanalysis. With these properties, the new JSM-IT810 covers a broad range of applications and ensures minimum time-to-result even for novice users. Operating a high-end FE SEM has never been easier with the JSM-IT810 series.
Features
- High resolution imaging and microanalysis even for magnetic or insulating materials utilizing the JEOL Hybrid Lens (HL) or Super Hybrid Lens (SHL) concept.
- High resolution imaging and microanalysis even for magnetic or insulating materials utilizing the JEOL Hybrid Lens (HL) or Super Hybrid Lens (SHL) concept.
- Probe currents up to ≥ 300 nA (SHL: ≥ 500 nA) for ultra-fast analyses.
- In-lens Schottky Plus source and double condenser lens setup for highest stability, continuous current adjustment, and maximum beam current even at low accelerating voltages.
- The NeoEngine electron beam control system and advanced auto functions provide fast transitions between high resolution imaging and high current analyses, without sacrificing performance.
- Neo Action function for unattended, sequential SEM and EDS analyses across the sample holder.
- JEOL ZeroMag for seamless transition between light optical and SEM imaging dramatically improves handling and through-put*.
- SEM Automatic Adjustment Package to automatically calibrate magnification as well as EDS and perform automated beam alignment. Ensures that the microscope stays in perfect conditions*.
- A choice of new backscattered electron detectors can be used to tailor the microscope to any applicative requirements*.
- Live functions* include real-time 3D topography maps, live EDS analyses and live EDS maps.
- Unique lens optics for extreme depth of focus and distortion-free imaging of large sample areas.
- Fully integrated JEOL EDS system* including live EDS for maximum ease-of-use and intuitive integration of all acquired data. Besides conventional EDS detectors, JEOL offers an own, geometry-optimized window-less EDS detector “Gather-X” for light element and high-troughput analyses.
- Built-in correction algorithm for distortion-free EBSD maps (trapezoidal correction)*
- Challenging, non-conductive samples can be easily investigated using the flexible low-vacuum system*.
- A new sample exchange system is designed *to change even larger samples in a safe, speedy, seamless mannre through simple operation.
- The JSM-IT810 can accomodate a large variety of analysis systems such as EDS, WDS, EBSD, CL and others.
- A unique Soft X-ray Emission Spectrometer* allows efficient and parallel collection of very low energy X-rays simutaneously providing unprecendented chemical state analysis.
*: Option.
Specifications
HL | SHL | |
|---|---|---|
Secondary electron image resolution | 0.7 nm（Accelerating voltage 20 kV） | 0.5 nm（Accelerating voltage 15 kV） |
Magnification | ×10 to 1,000,000 (Polaroid) | ×10 to 2,000,000 (Polaroid) |
Accelerating voltage | 0.01 to 30 kV | 0.01 to 30 kV |
Probe current | A few pA to ≥ 300 nA | A few pA to ≥ 500 nA |
Electron Gun | In-lens Schottky field emission electron gun | In-lens Schottky field emission electron gun |
Specimen stage | Fully eucentric goniometer stage | Fully eucentric goniometer stage |
Specimen exchange | One-action exchange mechanism available | One-action exchange mechanism available |
Electron detector system | In-lens detector with integrated filter, Everhart Thornley detector, Options: Retractable BSE detectors, STEM detectors and others | In-lens detector, Everhart Thornley detector, Options: Filtered in-lens detection, retractable BSE detectors, STEM detectors and others |
Analysis systems | EDS (JEOL with/without window, 3rd party systems), SXES, EBSD, WDS, CL, etc. | EDS (JEOL with/without window, 3rd party systems), SXES, EBSD, WDS, CL, etc. |
Video
Please note:
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.