Transmission Electron Microscopes (TEM)

JEOL JEM-ARM300F – new high ultimate Atomic Resolution Transmission Electron Microscope

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JEOL JEM-ARM300F – new high ultimate Atomic Resolution Transmission Electron Microscope

JEOL developed the JEM-ARM300F, a 300 kV atomic resolution transmission electron microscope featuring JEOL's own aberration correctors as an enhanced model of the JEM-ARM200F.

Nicknamed GRAND ARM, the JEM-ARM300F, incorporates JEOL's propriety dodecapole correctors, successfully increasing the resolution level to 63 pm (STEM resolution).

The GRAND ARM can be configured for ultra high resolution imaging or analytical applications for high sensitivity and in-situ analysis according to the user's needs.

The system is primarily intended for public and private research institutes and semiconductor manufacturers.

Features

  1. Ultra high resolution imaging
    Achieves a resolution of 63 pm in the scanning transmission electron microscope image (STEM) mode at an accelerating voltage of 300 kV, using JEOL's own spherical aberration corrector for the illumination system.

  2. High performance cold-cathode field-emission electron gun featuring high brightness and low energy dispersion
    Incorporates a new high performance cold cathode electron gun as standard; the high brightness beam with minimum chromatic aberration allows for high resolution imaging and analysis.

  3. Wide accelerating voltage range
    Supports accelerating voltage levels of 300 kV and 80 kV as standard; other accelerating voltage levels are optionally available as needed.

  4. Aberration corrector integrated with microscope base unit
    Incorporates JEOL's proprietary spherical aberration correctors in the image forming system (TEM aberration corrector) and in the illumination system (STEM spherical aberration corrector).

  5. Aberration corrector control system
    Uses the JEOL COSMO (JEOL Corrector System Module) system for auto control of the aberration correctors.

  6. Two types of objective lens pole piece
    Two types of objective lens pole piece are available to meet a wide range of users' applications.

  7. Vacuum system featuring dry pre-evacuation and high vacuum
    The vacuum system features a pre-evacuation system incorporating a turbo molecular pump as standard and an enhanced column evacuation system, achieving higher vacuum while minimizing contamination and damage in atomic level imaging and analysis.

  8. Stable column/console, specimen stage, and electrical system
    The column, 330 mm in diameter, features a higher level of mechanical rigidity. The microscope base unit is also designed to enhance its mechanical/electrical stability and resistance to environment, fully utilizing the stabilizing technologies developed for the JEM-ARM200F.

  9. A complete line of signal detectors
    A complete line of signal detectors are available, including EDS (energy dispersive X-ray spectrometer) up to 100 mm2 and EELS (electron energy loss spectrometer), backscattered electron detectors, and up to 4 STEM detectors. The microscope also supports simultaneous observation of high angle annular dark field image, low angle annular dark field image, annular bright field image and bright field image.

Specifications

Accelerating voltage

Maximum 300 kV

TEM lattice resolution

0.05 nm (with spherical aberration corrector
for image forming system)

STEM resolution

0.063 nm (spherical aberration corrector
for illumination system)

Options

  • JEOL Cosmo
  • EDS & EELS
  • STEM and TEM corrector (by JEOL)

Please note:

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.

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